239000002184 metal Substances 0.000 claims abstract description 169.229910052751 metal Inorganic materials 0.000 claims abstract description 169.239000000758 substrate Substances 0.000 claims abstract description 173.238000009713 electroplating Methods 0.000 title claims abstract description 197.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority to US4374297P priority Critical Priority to US43742 priority Application filed by University of Southern California USC filed Critical University of Southern California USC Priority to PCT/US1998/006591 priority patent/WO1998045504A1/en Publication of EP1015669A1 publication Critical patent/EP1015669A1/en Publication of EP1015669A4 publication Critical patent/EP1015669A4/en Application granted granted Critical Publication of EP1015669B1 publication Critical patent/EP1015669B1/en Anticipated expiration legal-status Critical Status Expired - Lifetime legal-status Critical Current Links Original Assignee University of Southern California USC Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Cohen Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Lifetime Application number EP98914464A Other languages German ( de)
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Google Patents Electroplating method for forming a multilayer structureĭownload PDF Info Publication number EP1015669B1 EP1015669B1 EP98914464A EP98914464A EP1015669B1 EP 1015669 B1 EP1015669 B1 EP 1015669B1 EP 98914464 A EP98914464 A EP 98914464A EP 98914464 A EP98914464 A EP 98914464A EP 1015669 B1 EP1015669 B1 EP 1015669B1 Authority EP European Patent Office Prior art keywords mask electroplating metal substrate layer Prior art date Legal status (The legal status is an assumption and is not a legal conclusion.
Google Patents EP1015669B1 - Electroplating method for forming a multilayer structure EP1015669B1 - Electroplating method for forming a multilayer structure
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